Shanghai, China, January 9, 2025 – AMEC Semiconductor Equipment (Shanghai) Co., Ltd. (hereinafter referred to as "AMEC", SSE stock code: 688012) and Nanchang AMEC Semiconductor Equipment Co., Ltd. jointly owned the invention patent "A Chemical Vapor Deposition Device and Its Cleaning Method" (Patent No.ZL201510218357.1) won the Silver Award of the 25th China Patent Award.

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China Patent Award is the highest honor in the field of patents in China, jointly sponsored by the State Intellectual Property Office and the World Intellectual Property Organization, and aims to encourage and commend patentees and inventors for their outstanding contributions to technological innovation and economic and social development. So far, AMEC has won 2 Gold Awards, 1 Silver Award and 3 Excellence Awards of China Patent Award, which marks AMEC's outstanding achievements in technological innovation and intellectual property protection.

The award-winning invention patent is the basic core patent of AMEC's MOCVD equipment products. MOCVD equipment is the most critical equipment for the manufacture of various microscopic devices of wide bandgap semiconductors, and the production of LED chips, power devices and other third-generation semiconductor devices by using single crystal epitaxial growth technology has broad application prospects. AMEC's MOCVD equipment has a good reputation in the industry, and its market share of MOCVD equipment for gallium nitride-based LED production has jumped to the first place in the world in the past few years, with a market share of more than 70%.

The award-winning patent provides a novel and ingenious design from the perspective of hydrodynamics and gas flow distribution in the reaction chamber, which separates the reaction gas exhaust from the collection and storage of reaction by-product deposits, avoids the blockage of the exhaust port by solid deposits, and cleverly solves the industry problems such as uneven exhaust, low process yield, frequent maintenance and low production efficiency that have been plagued in the field of MOCVD equipment. This breakthrough technology provides customers with more reliable and efficient production solutions, strongly promotes the technological progress of MOCVD equipment, and promotes the new development of LED lighting and display industry. This innovative achievement further consolidates AMEC's leading position in the MOCVD equipment market, and also makes great contributions to national energy conservation, emission reduction and energy consumption.

"AMEC has won the China Patent Award consecutively, demonstrating AMEC's leading position in R&D, innovation and intellectual property management." Dr. Yin Zhiyao, Chairman and General Manager of AMEC, said, "Innovation is the core driving force for AMEC's development. AMEC will always adhere to the product development principles of technological innovation, product differentiation and intellectual property protection, strengthen R&D investment, continue to break through technical bottlenecks, provide customers with more innovative and excellent quality products and services, and contribute more to the development of the global semiconductor industry. ”

About AMEC Semiconductor Equipment (Shanghai) Co., Ltd

AMEC Semiconductor Equipment (Shanghai) Co., Ltd. (stock abbreviation: AMEC, stock code: 688012) is committed to providing leading processing equipment and process technology solutions for global integrated circuit and LED chip manufacturers. The CCP high-energy plasma and ICP low-energy plasma etching developed by AMEC include more than a dozen subdivision etching equipment, which can cover most etching applications. AMEC's plasma etching equipment has been widely used by domestic and international first-tier customers, covering a wide range of etching applications from 65nm to 5nm and beyond. In the last decade, AMEC has focused on the development of a variety of conductor and semiconductor chemical thin film equipment, such as MOCVD, LPCVD, ALD and EPI equipment, and has made gratifying progress. AMEC has developed MOCVD equipment for the production of LED and power device epitaxial wafers that has already been put into mass production on the customer's production line, and occupies a leading position in the global GaN-based LED MOCVD equipment market. In addition, AMEC is also laying out optical and electron beam testing equipment, and developing a variety of pan-semiconductor micro-processing equipment. These devices are key to the manufacture of various microscopic devices, which can process and inspect various devices at the micrometer and nano scales. These microscopic devices are the foundation of the modern digital industry, and they are changing the way people produce and live. In the global semiconductor equipment customer satisfaction survey conducted by TechInsights (formerly VLSI Research) in the United States in the past five years, AMEC has won the third overall score three times, and the thin-film equipment has been rated first three times.